E-Beam evaporation, also called electron beam evaporation, is a form of physical vapor deposition.
The process is as below:
1. A target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum.
2. The electron beam causes atoms from the target to transform into the gaseous phase.
3. These atoms then precipitate into solid form, coating everything in the vacuum chamber with a thin layer of the anode material.
Link to this article: https://www.albmaterials.com/knowledge/what-is-e-beam-evaporation.html